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Overview |
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| 3D Photolithography |
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Light
transmission through a 3D
phase shifting mask in the DUV regime. Fully 3D simulation of the
Maxwell's equations, arbitrary angles of incidence, arbitrary
polarization, rigorous solutions.
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All rights reserved, JCMwave GmbH, 2007.
JCMwave GmbH, Haarer Str. 14a, D-85640 Putzbrunn, Germany,
Tel.: +49(0)89 460 65 68, Fax: +49 (0)89 2555 132 369 |
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