Applications
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Core-Shell Nanoparticle Resonances in Near-Field Microscopy Revealed by Fourier-demodulated Full-wave Simulations
This work presents a detailed investigation of the near-field optical response of core-shell nanoparticles using Fourier-demodulated full-wave simulations. The authors employed JCMsuite to simulate the scattering-type scanning near-field optical microscopy (s-SNOM) measurement process for cylindrically symmetric samples. These simulations, which closely mimic the experimental procedure, were used to explore the complex interplay of geometrical and optical resonances within core-shell nanostructures, revealing significant resonance shifts and enhanced scattering effects.
D. Dai, et al. Core-Shell Nanoparticle Resonances in Near-Field Microscopy Revealed by Fourier-demodulated Full-wave Simulations. Nano Letters, 24(43), 13747 (2024).
2024 DOI Publication link
Optical Metrology and Sensing, plasmonics, Advanced Finite Element Methods, Light Scattering Computation
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Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range
An imaging Mueller matrix ellipsometer is used to measure nanoscale line and grating structures in micron-sized measurement fields. To reconstruct the structural parameters from the ellipsometric data, numerical simulations using the finite element method were performed. The commercial FEM Maxwell solver JCMwsuite was employed to solve the inverse diffraction problem and to fit the measured Mueller matrix images by varying the simulation parameters in an optimization process.
J. Grundmann, et al. Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range. EPJ Web of Conferences 309, 02010 (2024).
2024 DOI Publication link
Optical Metrology and Sensing, Optical and EUV Lithography, Advanced Finite Element Methods, Optimization and Parameter Retrieval Methods
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Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions
A Bayesian target vector optimization method is fit to a finite element numerical model (JCMsuite) to a Grazing Incidence X-ray fluorescence data set to obtain the geometrical parameters of line gratin within the nanometer range. Convergence studies are performed to determine the numerical parameters that allow for an efficient and accurate reconstruction of the model parameters.
M. Plock, et al., Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions. Metrologia, 60, 054001, 2023.
2023 DOI Publication link
Optical Metrology and Sensing, Optical and EUV Lithography, integrated optics, Optimization and Parameter Retrieval Methods
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Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology
EUV scatterometry measurements and data evaluation on next-generation transistor candidates, the forksheet structures, are presented. The measure of EUV radiation is performed in PTB's compact measurement chamber at the X-ray beamline at BESSY II and the reconstruction of geometry data is performed by Scattering simulations computed with JCMsuite and numerical optimization scheme.
R. Ciesielski, et al. Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology. Proc. SPIE, 447 (2023).
2023 DOI
Optical Metrology and Sensing, Optical and EUV Lithography, Optimization and Parameter Retrieval Methods
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3D-nanoprinted on-chip antiresonant waveguide with hollow core and microgaps for integrated optofluidic spectroscopy
For the application field of optofluidics and liquid-based spectroscopy, the properties of hollow-core microgap waveguides are investigated. A good agreement of numerical simulations and experiments is shown.
J. Kim, et al. 3D-nanoprinted on-chip antiresonant waveguide with hollow core and microgaps for integrated optofluidic spectroscopy. Opt. Express, 31, 2833 (2023).
2023 DOI Publication link
Optical Metrology and Sensing, Photonic Waveguides and Fibers, Light Scattering Computation
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Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry
Kretschmann-Raether spectroscopic ellipsometry is used to monitor solid-liquid interfaces for biosensing applications. Within the developed phase retrieval and sample parameter reconstruction method, simulations with JCMsuite are used for the parameter reconstruction.
D. Mukherjee, et al. Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry. Proc. SPIE 12428, 124280S (2023).
2023 DOI Publication link
Optical Metrology and Sensing, plasmonics, Optimization and Parameter Retrieval Methods
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Challenges of Grazing Emission X-ray Fluorescence (GEXRF) for the Characterization of Advanced Nanostructured Surfaces
In this paper, the grazing emission X-ray fluorescence (GEXRF) technique is analyzed to determine the spatial distribution of various chemical elements in nanostructures and is compared to the well-established GISAXS method. Simulations of the X-ray standing wave field in the vicinity of and inside the nanostructure are performed with JCMsuite to obtain the angle-resolved fluorescence intensities and the far field scattering intensities.
D. Skroblin et al. Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces. Nanoscale, 14, 15475, (2022)
2022 DOI Publication link
Optical Metrology and Sensing, Optical and EUV Lithography, Light Scattering Computation, Optimization and Parameter Retrieval Methods
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Bayesian Target-Vector Optimization for Efficient ParameterReconstruction
In this paper, a Bayesian target-vector optimization scheme, specialized for parameter reconstruction problems with hundreds of observations is presented. The performance is compared to established methods for an optical metrology problem and two least-square problems.
M. Plock, et al. Bayesian Target-Vector Optimization for Efficient ParameterReconstruction. Advanced Theory and Simulations, 5, 2200112 (2022).
2022 DOI Publication link
Optical Metrology and Sensing, Optimization and Parameter Retrieval Methods, Uncertainty Quantification Methods
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Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples
In this work, scan-free GEXRF is applied in proof-of-concept measurements for the investigation of lateral ordered 2D nanostructures in the soft X-ray range. The numerical simulations with JCMsuite and the measurements from BESSY II synchrotron radiation facility are in excellent agreement.
S. Staeck, et al. Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples. Nanomaterials, 12, 3766 (2022).
2022 DOI Publication link
Optical Metrology and Sensing, Light Scattering Computation
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Long- and short-ranged chiral interactions in DNA-assembled plasmonic chains
Using DNA origami, plasmonic nano spheres and nanorods are aligned into a chiral structure whose CD signal was measured. The measurements are in good agreement with numerical simulations of JCMsuite using curvilinear higher order finite elements to resolve the complex plasmonic behavior.
K. Martens, et al. Long- and short-ranged chiral interactions in DNA-assembled plasmonic chains. Nat. Commun., 12, 2025 (2021).
2021 DOI Publication link
Optical Metrology and Sensing, optical chirality, optical resonators and antennas, plasmonics, Advanced Finite Element Methods, Light Scattering Computation
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Sub-diffraction limited localization of self-interacting nanoparticles above a mirror
By placing fluorescent nanoparticles above a mirror, the microscopy image depends sensitively on the axial position of the nanoparticle, which can be used for a sub-diffraction limited localization. A numerical simulation with JCMsuite shows that the localization sensitivity is an effect of the single emitter's interference with its own mirror image.
Y. Liu, et al. Axial localization and tracking of self-interference nanoparticles by lateral point spread functions. Nat. Commun., 12, 2019 (2021).
2021 DOI Publication link
Optical Metrology and Sensing, Light Scattering Computation
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Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
The angular resolved fluorescence signal from a grazing incidence X-ray illumination of periodic nanostructures is used to reconstruct its geometry parameters. The parameter reconstruction using JCMsuite is based on a finite-element model of the scattering and fluorescence process as well as an efficient Bayesian minimization of the disagreement between the simulated and the measured fluorescence signal.
A. Andrle, et al. Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning. Nanomaterials, 11, 7 (2021).
2021 DOI Publication link
Optical Metrology and Sensing, Light Scattering Computation, Optimization and Parameter Retrieval Methods, Uncertainty Quantification Methods
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Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
A Bayesian target vector optimization method is presented that enables the fast reconstruction of model parameters from measurements. It combines the advantages of conventional Bayesian optimization with specialized curve fitting algorithms such as the Levenberg-Marquardt method. The method is implemented in JCMsuite's Analysis and Optimization Toolkit.
M. Plock, et al. Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology. Proc. SPIE 11783,117830J (2021).
2021 DOI Publication link
Optical Metrology and Sensing, Optimization and Parameter Retrieval Methods
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Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
EUV scatterometry and grazing-incidence small-angle X-ray scattering (GISAXS) are compared for the parameter reconstruction of nanostructured surfaces. The reconstruction is based on a rigorous simulation with JCMsuite.
A. F. Herrero, et al. Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. Opt. Express, 29, 35580 (2021).
2021 DOI Publication link
Optical Metrology and Sensing, Light Scattering Computation
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Helicity-Preserving Optical Cavity Modes for Enhanced Sensing of Chiral Molecules
The handedness of chiral molecules can be detected by circular dichroism (CD). The work introduces a cavity composed of two parallel arrays of helicity-preserving silicon disks that allows one to enhance the CD signal by more than 2 orders of magnitude. In order to study the system numerically, JCMsuite is used to determine the T-matrix of the silicon cylinders.
J. Feis, et al. Helicity-Preserving Optical Cavity Modes for Enhanced Sensing of Chiral Molecules. Phys. Rev. Lett. 124, 033201 (2020).
2020 DOI
Optical Metrology and Sensing, optical chirality, Light Scattering Computation
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Self-Assembly of Plasmonic Nanoantenna-Waveguide Structures for Subdiffractional Chiral Sensing
The work investigates a method to probe the circular dichroism of an illuminated chiral object. JCMsuite is used to perform three-dimensional numerical simulations in order to support the experimental findings.
M. Rothe, et al. Self-Assembly of Plasmonic Nanoantenna–Waveguide Structures for Subdiffractional Chiral Sensing. ACS nano (2020).
2020 DOI
Optical Metrology and Sensing, optical chirality, optical resonators and antennas, plasmonics, Light Scattering Computation
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Inverted plasmonic lens design for nanometrology applications
Planar plasmonic lenses allow for focusing of light to sub-wavelength-sized spots. A new plasmonic lens design is proposed and numerically optimized using JCMsuite.
T. Käseberg, et al. Inverted plasmonic lens design for nanometrology applications. Measurement Science and Technology, 31(7), 074013 (2020).
2020 DOI Publication link
Optical Metrology and Sensing, diffractive optics, plasmonics, Light Scattering Computation
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Scanning tunneling microscopy for probing the dielectric response of metals at the atomic scale
Light emission from the gap cavity formed by the tip of a scanning tunneling microscope (STM) and a flat metallic sample allows to probe the dielectric response of metals at the atomic scale. The underlying phenomenon is confirmed by a full-wave optical simulations of the tip-substrate system using JCMsuite.
K. Edelmann, et al. Influence of Co bilayers and trilayers on the plasmon-driven light emission from Cu(111) in a scanning tunneling microscope. Phys. Rev. B 101, 205405 (2020).
2020 DOI
Optical Metrology and Sensing, optical resonators and antennas, Light Scattering Computation
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Benchmark of Global Optimization Approaches for Nano-optical Shape Optimization and Parameter Reconstruction
Several global optimization methods for three typical nano-optical optimization problems are benchmarked: particle swarm optimization, differential evolution, and Bayesian optimization as well as multistart versions of downhill simplex optimization and the limited-memory Broyden–Fletcher–Goldfarb–Shanno (L-BFGS) algorithm. In the shown examples, Bayesian optimization, mainly known from machine learning applications, obtains significantly better results in a fraction of the run times of the other optimization methods.
P.-I. Schneider, et al. Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction. ACS Photonics 6, 2726 (2019).
2019 DOI
Metamaterials, Optical Metrology and Sensing, Optical and EUV Lithography, quantum optics, Optimization and Parameter Retrieval Methods, software benchmarks
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JCMsuite used for Mueller matrix ellipsometry
JCMsuite is used as Maxwell solver in Mueller matrix ellipsometry, in this work by the German national metrology institute PTB.
T. Kaeseberg, et al. Mueller matrix ellipsometry for enhanced optical form metrology of sub-lambda structures. Proc. SPIE 11057, 110570R (2019).
2019 DOI
Optical Metrology and Sensing, Optimization and Parameter Retrieval Methods, software benchmarks