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  1. Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology

    EUV scatterometry measurements and data evaluation on next-generation transistor candidates, the forksheet structures, are presented. The measure of EUV radiation is performed in PTB's compact measurement chamber at the X-ray beamline at BESSY II and the reconstruction of geometry data is performed by Scattering simulations computed with JCMsuite and numerical optimization scheme.

    R. Ciesielski, et al. Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology. Proc. SPIE, 447 (2023).

    2023 DOI

    Optical Metrology and Sensing, Optical and EUV Lithography, Optimization and Parameter Retrieval Methods

  2. Scalable deterministic integration of two quantum dots into an on-chip quantum circuit

    An integrated quantum photonic circuit with two deterministically integrated quantum emitters is presented. Full 3D simulations with JCMsuite are performed to optimize the nanobeam cavity concerning the Purcell factor and the coupling efficiency into the waveguide.

    S. Li, et al. Scalable deterministic integration of two quantum dots into an on-chip quantum circuit. ACS Photonics, 10. Jg., Nr. 8, S. 2846-2853, (2023).

    2023 DOI Publication link

    Light Sources, integrated optics, optical resonators and antennas, quantum optics, Light Scattering Computation

  3. Uniform Huygens Metasurfaces with Postfabrication Phase Pattern Recording Functionality

    A novel way for the design and the fabrication of phase-gradient Huygens metasurfaces, which uses laser-annealing of uniform particles made of As_2S_3 glass, is presented. Within the design process, numerical simulations are performed with JCMsuite to compute the reflection, transmission, and positions of poles and zeros.

    E. Mikheeva, et al., Uniform Huygens Metasurfaces with Postfabrication Phase Pattern Recording Functionality. ACS Photonics, 10, 1538–1546 (2023).

    2023 DOI Publication link

    Metamaterials, Light Scattering Computation, Resonance Mode Computation

  4. Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation

    A compact source of extreme ultraviolet (EUV) for the characterization of samples in the EUV spectral range is presented and compared to a reference measurement with synchroton radiation. For the parameter reconstruction from the scattering data, numerical simulations with JCMsuite are performed with determined accuracy.

    L. M. Lohr, et al. Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation, Appl. Opt., 62, 117 (2023).

    2023 DOI Publication link

    Optical and EUV Lithography, Light Scattering Computation, Optimization and Parameter Retrieval Methods

  5. High-performance designs for fiber-pigtailed quantum-light sources based on quantum dots in electrically-controlled circular Bragg gratings

    A surrogate model combined with a Bayesian optimization approach to perform numerical optimization of the coupling from a hybrid circular Bragg grating to a fiber is presented. Resonance mode and scattering simulations are performed within JCMsuite where parameters such as the Purcell factor, the fiber coupling efficiency, and the collection efficiency are determined.

    L. Rickert, et al., High-performance designs for fiber-pigtailed quantum-light sources based on quantum dots in electrically-controlled circular Bragg gratings. Opt. Express 31, 14750-14770 (2023).

    2023 DOI Publication link

    Light Sources, integrated optics, optical resonators and antennas, Resonance Mode Computation

  6. Asymmetric phase modulation of light with parity-symmetry broken metasurfaces

    To design wavefront-shaping of metasurfaces, an analytic expression to predict the phase singularities in the complex plane and a general framework to predict and study these resonant systems are presented. It can be shown that breaking the out-of-plane symmetry allows for full-phase modulation with a single mode.

    E. Mikheeva, et al. Asymmetric phase modulation of light with parity-symmetry broken metasurfaces, Optica 10, 1287-1294 (2023).

    2023 DOI Publication link

    Metamaterials, optical resonators and antennas, Resonance Mode Computation

  7. Opportunities of polarization-resolved EUV scatterometry on photomasks

    A polarization-resolved analysis of the scattered EUV radiation to increase the sensitivity and minimize the uncertainties in the reconstruction of EUV Scattering is presented.

    Victor Soltwisch, et al., Opportunities of polarization-resolved EUV scatterometry on photomasks. Proc. SPIE 12802, 38th European Mask and Lithography Conference (EMLC 2023), 128020G (2023).

    2023 DOI

    Optical and EUV Lithography, Optimization and Parameter Retrieval Methods

  8. Transcending the Rayleigh Hypothesis with multipolar sources distributed across the topological skeleton of a scattere

    The Rayleigh Hypothesis is a well-known semi-analytical method for solving scattering problems with complex geometries and nontrivial near-fields. Here, an alternative representation of the fields by several sources, distributed on the skeleton of the scatterer is presented, where Scattering solutions are computed with JCMsuite.

    A. G. Lamprianidis, et al., Transcending the Rayleigh Hypothesis with multipolar sources distributed across the topological skeleton of a scattere. JQSRT, 296, 108455 (2023).

    2023 DOI Publication link

    other fields, Light Scattering Computation

  9. Investigation of Mode Coupling Introduced by Forward Rayleigh Scattering

    The cross-talk introduced by Rayleigh scattering in multi-mode fibers within 10 modes is estimated analytically. To validate the analytic formulation, the modes are computed with JCMsuite.

    C. M. Spenner, et al. Investigation of Mode Coupling Introduced by Forward Rayleigh Scattering. Photonic Networks; 24th ITG-Symposium, 1-6 (2023).

    2023

    Photonic Waveguides and Fibers, Propagation Mode Computation

  10. Rigorous modeling of a confocal microscope

    To build a reliable simulation tool for confocal microscopes, numerical studies with different software are performed and compared, one of them JCMsuite. Here, a line grating is investigated and the concept of the image formation method is presented.

    S. Wyss, et al. Rigorous modeling of a confocal microscope. Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 126190Q (2023).

    2023 DOI

    other fields, Light Scattering Computation

  11. Exploring Functional Photonic Devices made from a Chiral Metal–Organic Framework Material by a Multiscale Computational Method

    The combination of the metal-organic framework (novel group of crystalline porous thin-film materials) and electronic circular dichroism promises devices with unprecedented functionality. JCMsuite is used to simulate the resonances of the metal-organic cylinders.

    B. Zerulla, et al. Exploring Functional Photonic Devices made from a Chiral Metal–Organic Framework Material by a Multiscale Computational Method. Advanced Functional Materials, 34, 2301093 (2023).

    2023 DOI Publication link

    optical chirality, optical resonators and antennas, other fields, Resonance Mode Computation, other methods

  12. 3D-nanoprinted on-chip antiresonant waveguide with hollow core and microgaps for integrated optofluidic spectroscopy

    For the application field of optofluidics and liquid-based spectroscopy, the properties of hollow-core microgap waveguides are investigated. A good agreement of numerical simulations and experiments is shown.

    J. Kim, et al. 3D-nanoprinted on-chip antiresonant waveguide with hollow core and microgaps for integrated optofluidic spectroscopy. Opt. Express, 31, 2833 (2023).

    2023 DOI Publication link

    Optical Metrology and Sensing, Photonic Waveguides and Fibers, Light Scattering Computation

  13. Optical Spectra of Plasmon–Exciton Core–Shell Nanoparticles: A Heuristic Quantum Approach

    In this publication, a model to describe light-matter coupling in plasmonic core-shell nanocavities is presented and results are compared to measurements. The model brings the classical electromagnetic description together with a two-level system description, derived from Bloch equations.

    F. Stete, et al. Optical Spectra of Plasmon–Exciton Core–Shell Nanoparticles: A Heuristic Quantum Approach. ACS Photonics , 10, 2511–2520 (2023).

    2023 DOI Publication link

    plasmonics, quantum optics, Light Scattering Computation

  14. Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry

    Kretschmann-Raether spectroscopic ellipsometry is used to monitor solid-liquid interfaces for biosensing applications. Within the developed phase retrieval and sample parameter reconstruction method, simulations with JCMsuite are used for the parameter reconstruction.

    D. Mukherjee, et al. Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry. Proc. SPIE 12428, 124280S (2023).

    2023 DOI Publication link

    Optical Metrology and Sensing, plasmonics, Optimization and Parameter Retrieval Methods

  15. Optical Simulations of Perovskite-Perovskite Tandem Solar Cells

    Simulations with JCMsuite of the optical properties of planar and nanotextured perovskite/perovskite solar cells are presented. The thickness of the HG perovskite is varied and results are compared to experimental data.

    K. Jäger, et al., Optical Simulations of Perovskite/Perovskite Tandem Solar Cells. Advanced Photonics Congress 2023, Technical Digest Series (Optica Publishing Group, 2023), paper JM4D.3.

    2023 DOI

    Photovoltaics, Light Scattering Computation

  16. Chiral Generation of Hot Carriers for Polarization-Sensitive Plasmonic Photocatalysis

    In this publication, a chiral colloidal assembly of photocatalytic nanoribbons is investigated, to generate hot carriers for induced polarization-dependent photocatalytic reactions. The measured and simulated CD spectra and the theoretical extinction spectra of the Au nanoparticles show a good overall agreement.

    Y. Negrin-Montecelo, et al. Chiral generation of hot carriers for polarization-sensitive plasmonic photocatalysis. J. Am. Chem. Soc., 144, 1663-1671, (2022).

    2022 DOI Publication link

    optical chirality, plasmonics, Light Scattering Computation

  17. Nano-optical Designs for High-efficiency Monolithic Perovskite–silicon Tandem Solar Cells

    In this publication, a perovskite–silicon tandem solar cell with periodic nanotextures and an optically advanced rear reflector with a dielectric buffer layer is presented. The optimization of the design is performed with JCMsuite. Experiments could demonstrate a certified power conversion efficiency of 29.80%.

    P. Tockhorn, et al. Nano-optical designs for high-efficiency monolithic perovskite–silicon tandem solar cells. Nat. Nanotechnol. 17, 1214–1221 (2022).

    2022 DOI Publication link

    Photovoltaics, Light Scattering Computation, Optimization and Parameter Retrieval Methods

  18. Resonant Plasmonic–Biomolecular Chiral Interactions in the Far-Ultraviolet Films

    The work considers enhanced chiral sensing of a resonant plasmonic-biomolecular system, that operates in the far-UV. The analyzed structures are gammadions with biomolecular ultrathin amino acid films with bi-anisotropic material. The simulated circular dichroism using JCMsuite is in good agreement with experiment data.

    T. R. Leite, et al. Resonant Plasmonic–Biomolecular Chiral Interactions in the Far-Ultraviolet: Enantiomeric Discrimination of sub-10 nm Amino Acid Films. Nano Lett. 22, 7343 (2022).

    2022 DOI Publication link

    integrated optics, optical chirality, Advanced Finite Element Methods, Light Scattering Computation

  19. Challenges of Grazing Emission X-ray Fluorescence (GEXRF) for the Characterization of Advanced Nanostructured Surfaces

    In this paper, the grazing emission X-ray fluorescence (GEXRF) technique is analyzed to determine the spatial distribution of various chemical elements in nanostructures and is compared to the well-established GISAXS method. Simulations of the X-ray standing wave field in the vicinity of and inside the nanostructure are performed with JCMsuite to obtain the angle-resolved fluorescence intensities and the far field scattering intensities.

    D. Skroblin et al. Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces. Nanoscale, 14, 15475, (2022)

    2022 DOI Publication link

    Optical Metrology and Sensing, Optical and EUV Lithography, Light Scattering Computation, Optimization and Parameter Retrieval Methods