Applications
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Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
A Newton-like method is presented to solve inverse problems and to quantify parameter uncertainties. FEM, including direct computation of partial derivatives, is used to solve the forward-problem.
M. Hammerschmidt, et al. Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion. Proc. SPIE 10330, 1033004 (2017).
2017 DOI Publication link
Optical Metrology and Sensing, other fields, Advanced Finite Element Methods, Light Scattering Computation, Optimization and Parameter Retrieval Methods, Uncertainty Quantification Methods
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Optical field and attractive force at a subwavelength slit
FEM is used to validate analytical models for computing plasmonic excitations in metal subwavelength slits.
D. Shapiro, et al. Optical field and attractive force at the subwavelength slit. Opt. Express 24, 15972 (2016).
2016 DOI Publication link
diffractive optics, other fields, plasmonics, Advanced Finite Element Methods, Light Scattering Computation, software benchmarks
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Quantitative optical imaging for in-die-capable critical dimension targets
FEM simulations are used in a work by U.S. National Institute of Standards and Technology to optimize the design of in-die-capable metrology targets for process control in microlithography.
B. M. Barnes, et al. Enabling quantitative optical imaging for in-die-capable critical dimension targets. Proc. SPIE 9778, 97780Y (2016).
2016 DOI
Optical Metrology and Sensing, Optical and EUV Lithography, Advanced Finite Element Methods, Optimization and Parameter Retrieval Methods
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Strong and directionally specific forward scattering from optical nanoantennas
Near- and far-field analyses of optical scattering from asymmetric dimer nanoantennas is performed using JCMsuite.
A. Abass, et al. Insights into directional scattering: from coupled dipoles to asymmetric dimer nanoantennas. Opt. Express 24, 19638 (2016).
2016 DOI Publication link
diffractive optics, optical resonators and antennas, plasmonics, Advanced Finite Element Methods, Light Scattering Computation
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Deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography
Deterministic quantum-dot microlenses allow for efficient extraction of indistinguishable, single photons from quantum dots.
M. Gschrey, et al. Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography. Nat. Commun. 6, 7662 (2015).
2015 DOI Publication link
Light Sources, quantum optics, Advanced Finite Element Methods
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Numerical optimization of a photon-to-plasmon coupler for quantum plasmonics
An adaptive finite element method for full three dimensional simulations is used combined with the Taguchi method for optimization, for designing and optimizing an on-chip single- mode photon to surface plasmon coupler.
G. Kewes, et al. Design and numerical optimization of an easy-to-fabricate photon-to-plasmon coupler for quantum plasmonics. Appl. Phys. Lett. 102, 051104 (2013).
2013 DOI Publication link
Photonic Waveguides and Fibers, plasmonics, quantum optics, Advanced Finite Element Methods