Applications
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Chiral cavities made from lattices of highly electromagnetically-chiral scatterers
This work presents the design of a chiral optical cavity for the infrared fingerprint region, tailored to maximize the dissymmetry between different light polarizations (helicities). The key component is an optimized silver helix with near-maximum electromagnetic chirality, which serves as a building block for the cavity mirrors. JCMsuite's finite element solver and its Bayesian optimization toolkit were used to compute the optical response and to optimize the geometry of the silver helix for maximum chirality.
L. Rebholz, et al. Chiral cavities made from lattices of highly electromagnetically-chiral scatterers. arXiv, 2507.10481 (2025).
2025 DOI Publication link
Optical Metrology and Sensing, optical chirality, optical resonators and antennas, Light Scattering Computation, Optimization and Parameter Retrieval Methods
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Dinosaur Photonic Crystal Cavity Interfaces for Color Center Coupling to Triangular Nanostructures
The authors introduced and optimized 'Dinosaur' photonic crystal cavities with triangular cross-sections to create efficient spin-photon interfaces for quantum information applications. JCMsuite was used to perform finite element method simulations for computing cavity eigenmodes, quality factors, and mode volumes. Its integrated Bayesian optimization toolkit was employed to maximize the cavity quality factor, and scattering simulations were conducted to determine the waveguide coupling efficiency of the designed structures.
Julian M. Bopp, et al. Dinosaur Photonic Crystal Cavity Interfaces for Color Center Coupling to Triangular Nanostructures. arXiv:2510.26335 (2025).
2025 DOI Publication link
photonic crystals, quantum optics, Advanced Finite Element Methods, Light Scattering Computation, Optimization and Parameter Retrieval Methods, Resonance Mode Computation
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Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays
This work demonstrates a hybrid metrology technique combining soft X-ray scattering and fluorescence to reconstruct the dimensions of a silicon nitride nanoscale grating with high accuracy. To solve the inverse problem, the electric field strength of the standing wave field within the grating was calculated using JCMsuite’s finite element method solver. These near-field calculations were then used to compute diffraction efficiencies and fluorescence intensities, which were fitted to experimental data via an optimization process to determine the grating profile parameters.
L. M. Lohr, et al. Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays. Nanoscale, 17, 6017 (2025).
2025 DOI Publication link
Optical Metrology and Sensing, Optical and EUV Lithography, Advanced Finite Element Methods, Light Scattering Computation, Optimization and Parameter Retrieval Methods
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Investigation of Ti nanostructures via laboratory scanning-free GEXRF
This work demonstrates the non-destructive characterization of periodic TiO₂ nanogratings using laboratory-based scanning-free grazing-emission X-ray fluorescence (GEXRF) in the tender X-ray range. The angularly resolved fluorescence emission patterns were simulated using the finite-element Maxwell solver from JCMwave to model the electric field distribution and X-ray standing wave effects within the nanostructures. JCMsuite was essential for both validating the measured data against known sample parameters and performing a Bayesian-optimized reconstruction of the nanograting geometry from the experimental GEXRF maps.
S. Staeck, et al. Investigation of Ti nanostructures via laboratory scanning-free GEXRF. Nanoscale, 17, 3411 (2025).
2025 DOI Publication link
Optical Metrology and Sensing, diffractive optics, Advanced Finite Element Methods, Light Scattering Computation, Optimization and Parameter Retrieval Methods
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Physics-informed Bayesian optimization of expensive-to-evaluate black-box functions
This paper presents a physics-informed Bayesian optimization (BO) method that improves the efficiency of optimizing expensive-to-evaluate functions, such as those from physical simulations. The proposed method uses multi-output Gaussian processes to model the full vector of physical observables before mapping to a scalar objective, retaining more information and accelerating convergence. The performance of this method, implemented within JCMwave's JCMoptimizer suite, is benchmarked against standard BO and heuristic methods on real-world problems, including the inverse design of a nanophotonic beam-splitter simulated with JCMsuite.
I. Sekulic, et al. Physics-informed Bayesian optimization of expensive-to-evaluate black-box functions. Mach. Learn.: Sci. Technol. 6, 040503 (2025).
2025 DOI Publication link
Metamaterials, diffractive optics, integrated optics, optical resonators and antennas, software benchmarks, Optimization and Parameter Retrieval Methods
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Spectroscopic Ellipsometry of Plasmonic Gratings: Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty
This work investigates spectroscopic ellipsometry for dimensional metrology and sensing of gold plasmonic gratings. JCMsuite's finite element method (FEM) solver was used to design the gratings by maximizing the sensitivity of ellipsometric parameters and to simulate their optical response. The accurate FEM simulations were also crucial for calculating the limits of detection (LOD) for grating dimensions and refractive index sensing, identifying regions of sub-picometer sensitivity.
D. Mukherjee, et al. Spectroscopic Ellipsometry of Plasmonic Gratings: Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty. ACS Omega, 10, 14466 (2025).
2025 DOI Publication link
Optical Metrology and Sensing, diffractive optics, plasmonics, Light Scattering Computation, Optimization and Parameter Retrieval Methods
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High Purcell enhancement in all-TMDC nanobeam resonators
The authors propose an all-transition-metal-dichalcogenide (TMDC) nanobeam resonator with an active monolayer, designed to function as a high-β-factor nanolaser. A theoretical and computational framework for modeling and optimizing the Purcell enhancement was developed, based on a resonance expansion to resolve sharp spectral peaks from high-Q resonances. JCMsuite was used to perform the finite element method simulations of the 3D resonator and its resonance modes, and its Bayesian optimization tool was employed to maximize the Purcell enhancement under a Q-factor constraint.
F. Binkowski, et al. High Purcell enhancement in all-TMDC nanobeam resonator designs with active monolayers for nanolasers. Phys. Rev. B 112, 235410 (2025).
2025 DOI Publication link
Light Sources, optical resonators and antennas, photonic crystals, Optimization and Parameter Retrieval Methods, Resonance Mode Computation
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Bright Electrically Contacted Circular Bragg Grating Resonators with Deterministically Integrated Quantum Dots
This work presents the design and implementation of electrically contacted circular Bragg grating (CBG) resonators for cavity-enhanced quantum dot (QD) single-photon sources. The authors used the finite-element solver JCMsuite for full three-dimensional numerical simulations to model and optimize the photon extraction efficiency (PEE) of their novel ridge-based CBG designs. Furthermore, a Bayesian optimization algorithm within the JCMsuite framework was employed to determine the optimal device geometry parameters, such as ring widths, mesa radius, and ridge width, to maximize optical performance.
S. Wijitpatima, et al. Bright Electrically Contacted Circular Bragg Grating Resonators with Deterministically Integrated Quantum Dots. ACS Nano, 18, 31834 (2024).
2024 DOI Publication link
Light Sources, optical resonators and antennas, quantum optics, Advanced Finite Element Methods, Light Scattering Computation, Optimization and Parameter Retrieval Methods
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Introduction and application of a new approach for model-based optical bidirectional measurements
A new model-based evaluation method for optical bidirectional measurements, such as linewidth determination on micro- and nanostructures, was developed. JCMsuite's rigorous finite element method (FEM) solver was used to simulate the microscope imaging process, incorporating a modified Hopkins' approximation for computational efficiency. The simulated and measured intensity profiles were compared within a Bayesian Target Vector Optimization (BTVO) framework, also provided by JCMwave, to reconstruct the linewidth and other parameters with high accuracy.
J. Krüger, et al. Introduction and application of a new approach for model-based optical bidirectional measurements. Meas. Sci. Technol., 35, 085014 (2024).
2024 DOI Publication link
Optical Metrology and Sensing, Optical and EUV Lithography, Advanced Finite Element Methods, Optimization and Parameter Retrieval Methods
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Review and experimental benchmarking of machine learning algorithms for efficient optimization of cold atom experiments
This work benchmarks nine different machine learning algorithms for optimizing a cold atom experiment, specifically a rubidium molasses system with 10 and 18 adjustable parameters, using the post-cooling atom number as the optimization target. The JCMsuite's Bayesian optimization tool was implemented and extended with a noise-aware strategy (Noisy Expected Improvement) to efficiently handle the inherently noisy experimental data. The benchmarking demonstrated that this enhanced appraoch performed best in terms of speed and final atom number, particularly in high-noise and high-dimensional scenarios, showcasing its utility for automating complex experimental tuning.
O. Anton, et al. Review and experimental benchmarking of machine learning algorithms for efficient optimization of cold atom experiments. Mach. Learn.: Sci. Technol. 5, 025022 (2024).
2024 DOI Publication link
Optical Metrology and Sensing, quantum optics, Optimization and Parameter Retrieval Methods
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Mixed noise and posterior estimation with conditional deepGEM
This work develops an expectation-maximization algorithm for jointly estimating posterior distributions and mixed (additive and multiplicative Gaussian) noise parameters in Bayesian inverse problems. The authors apply their method to real-world applications in nanometrology, specifically EUV scatterometry for characterizing nanostructures. JCMsuite was used to simulate the complex optical forward model (solving Maxwell's equations) for a line grating with an oxide layer, generating the data necessary to train and validate their proposed deep learning framework.
P. Hagemann, et al. Mixed noise and posterior estimation with conditional deepGEM. Mach. Learn.: Sci. Technol. 5, 035001 (2024).
2024 DOI Publication link
Optical Metrology and Sensing, software benchmarks, Advanced Finite Element Methods, Optimization and Parameter Retrieval Methods, Uncertainty Quantification Methods
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Optimizing Aesthetic Appearance of Perovskite Solar Cells Using Color Filters
This study optimizes the color appearance of perovskite solar cells by integrating them with MorphoColor interference filters. The researchers used Bayesian optimization (implemented with JCMwave’s commercial software) to adapt the filter design, minimizing the color distance between the combined stack and the target aesthetic appearance. The optimization allowed tailoring of the bridging layers, achieving both a desired green color and improved photocurrent in the solar cell.
J. Schaible, et al. Optimizing Aesthetic Appearance of Perovskite Solar Cells Using Color Filters. Sol. RRL, 2400627 (2024).
2024 DOI Publication link
Photovoltaics, diffractive optics, Optimization and Parameter Retrieval Methods
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Sawfish Photonic Crystal Cavity for Near-Unity Emitter-to-Fiber Interfacing in Quantum Network Applications
A novel "Sawfish" photonic crystal cavity design is proposed for interfacing solid-state quantum emitters, specifically tin vacancy centers in diamond, with optical fibers for quantum network applications. The design was optimized to maximize the Purcell-enhanced emission coupling efficiency and adiabatic mode conversion from the nanocavity into a single-mode fiber. Full 3D finite element method (FEM) simulations and Bayesian optimization performed with JCMsuite were used to design and optimize the cavity, waveguide, and fiber coupling geometry, and to analyze its robustness to fabrication tolerances using surrogate modeling.
J. M. Bopp, et al. Sawfish Photonic Crystal Cavity for Near-Unity Emitter-to-Fiber Interfacing in Quantum Network Applications. Adv. Optical Mater. 12, 2301286 (2024).
2024 DOI Publication link
optical resonators and antennas, photonic crystals, quantum optics, Light Scattering Computation, Optimization and Parameter Retrieval Methods
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Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range
An imaging Mueller matrix ellipsometer is used to measure nanoscale line and grating structures in micron-sized measurement fields. To reconstruct the structural parameters from the ellipsometric data, numerical simulations using the finite element method were performed. The commercial FEM Maxwell solver JCMwsuite was employed to solve the inverse diffraction problem and to fit the measured Mueller matrix images by varying the simulation parameters in an optimization process.
J. Grundmann, et al. Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range. EPJ Web of Conferences 309, 02010 (2024).
2024 DOI Publication link
Optical Metrology and Sensing, Optical and EUV Lithography, Advanced Finite Element Methods, Optimization and Parameter Retrieval Methods
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Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions
A Bayesian target vector optimization method is fit to a finite element numerical model (JCMsuite) to a Grazing Incidence X-ray fluorescence data set to obtain the geometrical parameters of line gratin within the nanometer range. Convergence studies are performed to determine the numerical parameters that allow for an efficient and accurate reconstruction of the model parameters.
M. Plock, et al., Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions. Metrologia, 60, 054001, 2023.
2023 DOI Publication link
Optical Metrology and Sensing, Optical and EUV Lithography, integrated optics, Optimization and Parameter Retrieval Methods
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Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology
EUV scatterometry measurements and data evaluation on next-generation transistor candidates, the forksheet structures, are presented. The measure of EUV radiation is performed in PTB's compact measurement chamber at the X-ray beamline at BESSY II and the reconstruction of geometry data is performed by Scattering simulations computed with JCMsuite and numerical optimization scheme.
R. Ciesielski, et al. Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology. Proc. SPIE, 447 (2023).
2023 DOI
Optical Metrology and Sensing, Optical and EUV Lithography, Optimization and Parameter Retrieval Methods
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Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation
A compact source of extreme ultraviolet (EUV) for the characterization of samples in the EUV spectral range is presented and compared to a reference measurement with synchroton radiation. For the parameter reconstruction from the scattering data, numerical simulations with JCMsuite are performed with determined accuracy.
L. M. Lohr, et al. Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation, Appl. Opt., 62, 117 (2023).
2023 DOI Publication link
Optical and EUV Lithography, Light Scattering Computation, Optimization and Parameter Retrieval Methods
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Opportunities of polarization-resolved EUV scatterometry on photomasks
A polarization-resolved analysis of the scattered EUV radiation to increase the sensitivity and minimize the uncertainties in the reconstruction of EUV Scattering is presented.
Victor Soltwisch, et al., Opportunities of polarization-resolved EUV scatterometry on photomasks. Proc. SPIE 12802, 38th European Mask and Lithography Conference (EMLC 2023), 128020G (2023).
2023 DOI
Optical and EUV Lithography, Optimization and Parameter Retrieval Methods
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Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry
Kretschmann-Raether spectroscopic ellipsometry is used to monitor solid-liquid interfaces for biosensing applications. Within the developed phase retrieval and sample parameter reconstruction method, simulations with JCMsuite are used for the parameter reconstruction.
D. Mukherjee, et al. Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry. Proc. SPIE 12428, 124280S (2023).
2023 DOI Publication link
Optical Metrology and Sensing, plasmonics, Optimization and Parameter Retrieval Methods
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Nano-optical Designs for High-efficiency Monolithic Perovskite–silicon Tandem Solar Cells
In this publication, a perovskite–silicon tandem solar cell with periodic nanotextures and an optically advanced rear reflector with a dielectric buffer layer is presented. The optimization of the design is performed with JCMsuite. Experiments could demonstrate a certified power conversion efficiency of 29.80%.
P. Tockhorn, et al. Nano-optical designs for high-efficiency monolithic perovskite–silicon tandem solar cells. Nat. Nanotechnol. 17, 1214–1221 (2022).
2022 DOI Publication link
Photovoltaics, Light Scattering Computation, Optimization and Parameter Retrieval Methods