Displaying items by tag: optical metrology and sensing

Challenges of Grazing Emission X-ray Fluorescence GEXRF for the Characterization of Advanced Nanostructured Surfaces

Published in 2022
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Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

Published in 2022
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Bayesian Target-Vector Optimization for Efficient ParameterReconstruction

Published in 2022
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Sub-diffraction limited localization of self-interacting nanoparticles above a mirror

Published in 2021
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Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Published in 2021
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Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology

Published in 2021
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Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning

Published in 2021
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Long- and short-ranged chiral interactions in DNA-assembled plasmonic chains

Published in 2021
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Self-Assembly of Plasmonic Nanoantenna-Waveguide Structures for Subdiffractional Chiral Sensing

Published in 2020
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Inverted plasmonic lens design for nanometrology applications

Published in 2020
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Scanning tunneling microscopy for probing the dielectric response of metals at the atomic scale

Published in 2020
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Helicity-Preserving Optical Cavity Modes for Enhanced Sensing of Chiral Molecules

Published in 2020
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Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

Published in 2018
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Metrology of nanoscale grating structures by UV scatterometry

Published in 2017
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Investigating surface structures by EUV scattering

Published in 2017
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Whispering gallery mode lasers for sensing applications

Published in 2017
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Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Published in 2017
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Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

Published in 2017
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FEM for validation of alternative scattering computation method

Published in 2017
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Modeling of Optical Imaging of Finite Multi-Line Arrays

Published in 2016
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Quantitative optical imaging for in-die-capable critical dimension targets

Published in 2016
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Design of a plasmonic near-field tip for super-resolution IR-imaging

Published in 2016
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Efficient Bayesian inversion for shape reconstruction of lithography masks

Published in 2010
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Crescent-Shaped Metal Nanoparticles for Sensing Applications

Published in 2009
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Benchmark of computational methods for mask simulation in optical lithography

Published in 2005
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JCMsuite used for Mueller matrix ellipsometry

Published in 2019
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Benchmark of Global Optimization Approaches for Nano-optical Shape Optimization and Parameter Reconstruction

Published in 2019
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Gaussian process regression for efficient parameter reconstruction

Published in 2019
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EUV mask feature reconstruction via phase retrieval

Published in 2019
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Grazing incidence x-ray fluorescence based profile reconstruction

Published in 2019
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